Products for Industry
Plasma Cleaner (Parallel Electrode) PDC510
Item Code : 215054
Model : PDC510
Plasma Cleaner (Parallel Electrode) (PDC510)
Product Summary
Plasma Surface Treatment Device
Features of Plasma Cleaner (Parallel Electrode) (PDC510)
- Small and compact, suitable for R&D or any other dry cleaning processes
- Simple and compact plasma surface treatment device
- Feature
- RIE / DP mode changeable
- Feature
- Excellent electrode structure for plasma uniformity
- Feature
- Touch panel for easy operation
- Feature
- Equipped with 0 point stability vacuum manometer
Specifications
Specifications
Item Code | 215054 |
---|---|
Model | PDC510 |
Plasma Mode | RIE / DP mode changeable |
Electrode Structure | Parallel flat stage |
RF Power | MAX. 500W |
Oscillation Frequency | 13.56MHz Quartz Oscillator |
Display | LED touch panel |
Chamber Dimensions | W500 × D300 × H200mm |
Stage Size | W400 × D200mm |
Chamber Material | Aluminium |
Reaction Gas | 2 systems(Ar, O2) |
Purge Gas | N2 or Dry air |
Reaction Gas Flow Control | Mass flow controller |
Vacuum Pump | Included (Aprox. 500 L/min) |
Gas Inlet Port | Reaction Gas: 2 points, Purge Gas: 1 point |
Internal dimensions(W×D×H mm) | 500×300×200mm |
External dimensions(W×D×H mm) | 700×700×1285mm |
Power Source |
AC200V~AC415V
Three phase with step-down transformer |
Weight | 180kg |
Maintenance and warranty
Conditions: temperature and humidity: 23 deg.C+/-5 deg.C, 65%RH+/-20% (no load)
External dimensions do not include protrusions.