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Plasma Apparatus

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Model CV600
Plasma mode RIE • DP
Electrode Parallel flat stage plate
RF generator power 100 - 600W
Oscillating 13.56MHz
Control system Digital display and one touch control
Chamber (W) 310 x (D) 220 x (H) 140mm
Electrode stage (W) 230 x (D) 140mm
Chamber material SUS
Reaction gas O2,Ar
Purge gas N2 or Dry air
Flow meter Flow meter
Vacuum pump Vacuum pump(120L/min)
Gas system 2 line and purge line
External dimensions (W) 480 x (D)500 x (H) 1,065mm
Power supply(50/60Hz) AC200/220/380V Three phase 7A
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