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Plasma Apparatus
IV600 (Magazine to Magazine process)
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Magazine to Magazine plasma process

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Specifications
Model IV600
Plasma method RIE
Electrode structure For Magazine correspondence electrode structure
RF generator 100-600W
Oscillating frequency 13.56MHz
Control system LCD touch panel with PLC
Chamber size (W)230×(D)400×(H)200mm
Chamber material Aluminum
Reaction gas O2,Ar
Purge gas N2 or Dry air
Flow meter Mass flow control 2 line
Vacuum pump 1000L/min
Gas system 2 line (Reaction gas) , 1 line (Purge gas)
External dimension (W)1,000×(D)900×(H)970mm
Power supply AC200/220/380V 3 phase 10A
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