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HOMEProductsPlasma Cleaner, AsherMPC600
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Plasma Apparatus
MPC600
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  • RIE • DP mode
  • Electrode stage - up to 6 inch
  • RF power is up to MAX. 600W
  • One touch control
  • Made of quart glass chamber

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Specifications
Model MPC600
Method RIE • DP mode
Electrode Aluminum round type
RF generator 50 - 600W
Oscillating frequency 13.56MHz
Control system Digital display with one touch operation
Chamber Adapted for 6 inch wafer
Chamber material SUS
Reaction gas O2,Ar,CF4
Purge gas N2 or Dry air
Flow meter Mass flow control
Vacuum pump 5000L/min
Gas system 2 line (Reaction gas) , 1 line (Purge)
External dimension (W)650 x (D)700 x (H)1,480mm
Power supply AC200/220/380V 3 phase 25A
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