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HOMEProductsPlasma Cleaner, AsherPB600/PB1000S/PA600D
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Gas Plasma Ashers
PB600/PB1000S/PA600D
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  • The PB series are of barred type of direct plasma method, and can be operated automatically by simple setting.
  • The model PA600is a plasma ashing system after the downflow method, which copes with a 6-inch wafer.
Model
PB600 PB1000S PA600D
Plasma Mode
DP DF
DP : Direct Plasma
DF : Downflow
High-frequency Output
Max.
600W
Max.
1000W
Max.
600W
Oscillating Frequency
13.56 MHz
Dimension of Stage (mm)
o200
×300
o300
×500
for
6-inch
wafer
PDF Catalog

Downflow method

Specifications
Model PB600 PB1000S PA600D
Plasma method Barred type of DP mode DF mode
Electrode Split of Opposite electrode structure Round type electrode structure
RF generator 0 to 600W 50 to 1,000W 0 to 600W
Oscillating frequency 13.56MHz
Control system Digital display with PLC control Touch panel with PLC Digital display with one touch operation
Tuning method Automatic and Manual tuning
Timer 1 sec. to 9H 59min.59 sec.
Chamber Made of quart glass
Chamber size ø200×300mmL ø300×500mmL Adapt for 6 inch wafer
Chamber temperature Digital display
Reaction gas O2,CF4 or others O2,Ar,CF4,C5F8,SF6 or others
Purge gas N2 or Dry air
Flow meter Flow meter 1 line
(O2 0 to 1,000 ml/min.)
Mass flow control with digital display
(CF4 0 to 300sccm, O2 0 to 1,000sccm)
Vacuum gauge Piranie type
(0.4 to 3,000Pa/0.004 to 30Torr)
Digital display (0.4 to 3,000Pa/0.004 to 30Torr)
Vacuum pump 250 ml/min. 700 ml/min.
Emargency stop switch Push type switch
Gas port 1 line (1/4" SUS Swagelok) 2 line (1/4" SUS Swagelok)
Purge port 1 line (1/4" SUS Swagelok) 1 line (1/4" SUS Swagelok)
Vacuum port 1 line ( SUS NW25) 1 line ( SUS NW25)
External dimensions 500mmW×600mmD×650mmH 640mmW×850mmD×1,695mmH 650mmW×800mmD×1,500mmH
Power supply AC200/220/380V, 3 phase
and AC100/220V, single phase
Weight Approx. 130kg Approx. 180kg Approx. 150kg
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