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HOMEProductsPlasma Cleaner, AsherPC1000-5030
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Plasma Apparatus
PC1000-5030
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RIE / DP mode selectable

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Specifications
Model PC1000-5030
Plasma method RIE • DP
Electrode Parallel flat stage plate
RF generator 100~1000W
Oscillation frequency 13.56MHz
Control system LCD Touch panel with PLC
Chamber size (W)600×(D)370×(H)145mm
Stage size (W)500×(D)300mm
Chamber material Aluminum
Reaction gas O2,Ar,CF4,C5F8,SF6 or others
Purge gas N2 or Dry air
Flow meter Mass flow control 2 line
Vacuum pump 700L/min
Gas system 2 line (Reaction gas) , 1 line (Purge gas)
External dimension (W)900×(D)950×(H)1,530mm
Power supply AC200/220/380V 3 phase 25A
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