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Plasma Cleaner
PDC200/210/510
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PDC210

  • Despite being desktop models, they feature high performance, are simple to use, and can obtain data easily.
  • They are genuine RIE systems, and can be DP systems with the use of options.
Purpose : Removal of Organic films, Surface cleaning, Surface reforming, Surface etching etc.

Model
200 210 510
Plasma Mode
RIE or (RIE/DP) RIE/DP
RIE : Reactive Ion Etching
DP : Direct Plasma
High-frequency Output
Max.300W Max.500W
Oscillating Frequency
13.56 MHz
Dimension of Stage(mm)
250×170 410×170

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Specifications
Model PDC-200/210/510
Plasma Mode PDC-200&210 : RIE(RIE/ DP:option) / PDC-510 : RIE/ DP
Main Unit
Aluminum chamber Internal dimension: 400mmW×250mmD×150mmH
Electrode Parallel flat stage plate: 230mmW×170mmD
Vacuum gauge Capacitance manometer
Reaction gas system Two systems(Ar,O2)
Controller Programmable controller
Display LCD Touch panel Display
Radio-Frequency Power Supply
Input PDC-200: AC 100V,Single phase, 8A (50/60 Hz) / PDC-210: AC 200V,Three phase, 15A (50/60 Hz)
Radio-frequency output power PDC-200:300W / PDC-210:500W
Reference oscillator Quartz oscillator
Oscillating frequency 13.56 MHz
Matching adjustment Automatic tuning
Discharge System (Vacuum Pump) only PDC-210 / PDC200 Optional
Displacement Total 345 liters/min.
Input power supply Three phases, AC200V, 4A, 50/60 Hz / PDC-200 Single phase ,AC100V,4A,(50/60Hz)
Inlet configuration NW25
Outlet configuration NW25
Gas Systems
Purge gas Nitrogen (N2) and a regulator (3 kgf/cm2) with a manometer
Reaction gas G1 Oxygen (O2) and a mass flow controller (500 secm) / PDC-200:(200 secm)
Reaction gas G2 Argon (Ar) and a mass flow controller (100 secm)
Safety Mechanisms
System Protections (1) Watching Vacuum Pump and RF generater
Watching over current by Thermal Protector Magnetic relay.
(2) Product Quartz oscillator
When Matching unit have miss matching,protect quartz oscillator.
(3) Door Panel Inter lock
Build Inter lock switch.
Actions against a trouble of the vacuum pump The plasma scrubber takes the counteractions listed below and show an Alarm message on its display when something wrong happens on the vacuum pump.
*The main valve closes *The gas feed valve closes *The isolation valve closes *The oscillator stops outputting *Treatment process is suspended *The Alarm buzzer starts sounding *The treatment process timer stops.
REQUIRED UTILITIES
Power Supply
Main unit with vacuum pump

PDC-200: Single phases, AC100V, 15 A, 50/60Hz
PDC-210: Three phases, AC200V, 15 A, 50/60Hz
(with an accessory power cable of 3 meters long, and exposed crimp-style terminals of 8 millimeters long)

Gases
Purge gas Nitrogen (N2) (Feed pressure: 2~7 kgf/cm2)
Reaction gas G1 Oxygen (O2) (Feed pressure: 1.5 kgf/cm2)
Reaction gas G2 Argon (Ar) (Feed pressure: 1.5 kgf/cm2)
Connection port 1/4" swagelok joint bulkhead union (SS-400-61)
  Note: Pressure regulators, filters and other protective devices shall be prepared by others.
Connection Diameter of the Discharge Duct (and inlet Port)
Vacuum pump's inlet port NW25 (with a flexible stainless steel hose of 1 meter long)
Vacuum pump's outlet port NW25
  Note: Every port has a connector designed for a flexible hose.

Interior

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