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HOMEProductsPlasma Cleaner, AsherV1000/V1000X/V1000XS
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Plasma Cleaner
V1000/V1000X/V1000XS
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Purpose : Removal of Organic films, Surface cleaning, Surface reforming, Surface etching etc.

Model
V1000 V1000X V1000XS
Plasma Mode
RIE and DP
RIE : Reactive Ion Etching
DP : Direct Plasma
High-frequency Output
1000W 1000W/1500W
Oscillating Frequency
13.56 MHz
Dimension of Stage(mm)
280×280 300×300 400×375
PDF Catalog

Specifications
Model V-1000 V-1000X V-1000XS
Plasma Mode RIE and DP
Main Unit
Electrode structure Parallel flat stage plate
Stage size 280mmW×280mmD 300mmW×300mmD(Double stage) 400mmW×375mmD
Chamber size 400mmW×400mmD×380mmH 400mmW×400mmD×380mmH 600mmW×554mmD×440mmH
Vacuum gauge Capacitance manometer
Reaction gas system Two systems
Controller Programmable controller
Display Programmable terminal (touch panel)
Radio-Frequency Power Supply
Input AC 200/220/380V,Three phase,
Radio-frequency output power 1,000W 1,000 & 1,500W
Reference oscillator Quartz oscillator
Oscillating frequency 13.56 MHz
Matching adjustment Automatic tuning
Discharge System (Vacuum Pump)
Displacement 670 & 1,000 liters/min. 670 & 1,500 liters/min. 1,000 & 1,500 liters/min.
Inlet configuration NW40 with a flexible stainless steel hose (1 meter long)
Outlet configuration NW40
Gas Systems
Purge gas Nitrogen (N2) and a regulator (3 kgf/cm2) with a manometer
Driving gas Air or nitrogen (N2) and a regulator (alarm contact at 10 kgf/cm2) with a manometer
Reaction gas G1 Oxygen (O2) and a mass flow controller (1000 secm)
Reaction gas G2 Argon (Ar) and a mass flow controller (100 secm)
Safety Mechanisms
System Protections *Oscillator protection circuit *Front-door interlock switch (interlocked with the startup)
*Safety switches (interlock switch on the side panels) *Vacuum leak test function
*Air-purge end buzzer *Alarm buzzer *Emergency stop push-button switch
Actions against a trouble of the vacuum pump The plasma scrubber takes the counteractions listed below and show an Alarm message on its display when something wrong happens on the vacuum pump.
*The main valve closes *The gas feed valve closes *The isolation valve closes
*The oscillator stops outputting *Treatment process is suspended *The Alarm buzzer starts sounding
* The alarm indicator lamp lights up to notify the trouble of the vacuum pump
*The treatment process timer stops
REQUIRED UTILITIES
Power Supply
Main unit with vacuum pump Three phases, AC220V, 30 A, 60Hz (with an accessory power cable of 3 meters long, and exposed crimp-style terminals of 8 millimeters long)
Gases
Driving gas Air or nitrogen (N2) (Feed pressure: 5 to 7 kgf/cm2)
Purge gas Nitrogen (N2) (Feed pressure: 2 to 7 kgf/cm2)
Reaction gas G1 Oxygen (O2) (Feed pressure: 1.5 kgf/cm2)
Reaction gas G2 Argon (Ar) (Feed pressure: 1.5 kgf/cm2)
Connection port 1/4" swagelok joint bulkhead union (SS-400-61)
Note: Pressure regulators, filters and other protective devices shall be prepared by others.
Connection Diameter of the Discharge Duct (and inlet Port)
Vacuum pump's inlet port NW4O (with a flexible stainless steel hose of 1 meter long)
Vacuum pump's outlet port NW4O
Main unit's ozone outlet port 163mm diameter
Oscillator's ventilation port 163mm diameter
Note: Every port has a connector designed for a flexible hose. Connect a duct to these inlet and outlet ports.

Control Display Chamber

Programmable control (touch panel)


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