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HOMEProductsPlasma Cleaner, AsherV1500X
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Plasma Apparatus
V1500X
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  • RIE / DP mode selectable
  • Aluminum chamber
  • For Magazine CSP/BGA
  • LCD Touch panel operation
  • Easy to set up parameter and operation
  • Built in safety function with Emergency stop switch
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Specifications
Model V1500X
Plasma method RIE • DP mode
Electrode Parallel flat stage plate
Chamber temperature Digital display
RF generator 100~1500W
Oscillation 13.56MHz
Control system LCD Touch panel with PLC
Tuning method Automatic and Manual
Timer 1sec-9H 59min 59 sec
Chamber size (W)600×(D)550×(H)600mm
Stage size (W)460×(D)400mm
Chamber material Aluminum
Reaction gas O2,Ar,CF4
Purge gas N2 or Dry air
Flow meter Mass flow control 2 line
Vacuum pump 1,400L/min
Emergency stop switch Push type switch
Gas port 2 pc (1/4"SUS swage - lock)
Purge port 1pc (1/4"SUS swage - lock)
Vacuum port 1pc (SUS NW40)
External dimension (W)900×(D)1,000×(H)1,700mm
Power supply AC200/220/380V 3 phase 25A
Weight Approx. 300kg
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