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Atmospheric Plasma Cleaner
YAP510S (On Patent Applying)
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Atmospheric Plasma Cleaner can be applied to wide range of usage such as electronic material by utilizing high-activation of high-energy electron and radical ion in plasma reaction.

This equipment has a lot of advantages;

  • Vacuum Process is not required
  • Simple Utility Preparation (Reaction gas and power supply only)
  • Setting space also is saved (because of no vacuum system)
  • Vacuum tank is not required so that the wider space is available for various purposes.
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Features
  • The sample can be directly plasma-processed just by putting it on the stage.
  • Low Temp. Plasma is available because of the atmospheric glow-discharging plasma
  • Easily applied to In-line system because of no vacuum system.

Application
  • Surface treatment for high polymer materials
  • Glass panel cleaning for FPD
  • Ashing treatment
  • Surface activation(Oxidation or Deoxidization)

Specifications
Standard Sample Size 300 x 300mm (Can be customized)
Power Supply High Frequency Power Supply (Low Frequency also available)
Power Output 500W
Gas 3 lines (Selectable from Ar, He, O2 and N2)
Gas Flow Rate 1 to 10L/min.
Utility Power Supply AC200V, 3-phase, 15A
Exhaust Duct 10f
Standard Equipment Dimensions 730W x 750D x 1,700Hmm

Control

PLC, Touch Panel
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